Certified Fire Protection Specialist (CFPS) Practice

In semiconductor cleanrooms, exhaust ducts are primarily made of fiberglass reinforced plastic (FRP) due to its advantageous properties for maintaining a clean environment. FRP is highly resistant to chemicals commonly found in the semiconductor manufacturing process, which makes it ideal for the harsh conditions of cleanrooms. Additionally, FRP is lightweight and has good thermal insulation properties, which minimizes the risk of condensation and helps maintain process accuracy.

This material also has a smooth surface finish, reducing the likelihood of particulate accumulation and enhancing cleanability, which is crucial in maintaining the stringent cleanliness standards required in semiconductor facilities. Furthermore, FRP does not corrode like metal options and is less susceptible to the wear and stress inflicted by a highly controlled cleanroom atmosphere.

While other materials like stainless steel or aluminum might be durable, they can also pose challenges such as temperature conductivity or susceptibility to corrosion, depending on the specific cleanroom processes and environments. Wood composites, on the other hand, are not suitable for such applications due to their susceptibility to moisture and environmental factors that compromise both cleanliness and structural integrity.